Substrate-imprinting apparatus and methods

ABSTRACT

A package includes at least one electronic component mounted on a substrate formed through imprinting. In an embodiment, the substrate may comprise conductive traces, vias, and patterns of lands on one or more layers. Conductor features of different geometries may be formed by imprinting them simultaneously on one or both surfaces of an imprintable tape. Fabrication apparatus and methods, as well as application of the imprinted package to an electronic assembly, are also described.

RELATED APPLICATIONS

The present application is a divisional of U.S. patent application Ser.No. 10/322,902, filed on Dec. 18, 2002, which is incorporated herein byreference.

The present application is related to the following applications, whichare assigned to the same assignee as the present application:

(1) Ser. No. 10/323,165, entitled “Methods for Manufacturing ImprintedSubstrates”; and

(2) Ser. No. 10/335,187, entitled “Methods for Performing SubstrateImprinting using Thermoset Resin Varnishes”.

TECHNICAL FIELD

The subject matter relates generally to electronics packaging. Moreparticularly, the subject matter relates to an electronic package thatincludes an electronic component packaged on a substrate formed throughimprinting, and to manufacturing apparatus and methods related thereto.

BACKGROUND INFORMATION

Integrated circuits (ICs) have typically been assembled into electronicpackages by physically and electrically coupling them to a substratemade of organic or ceramic material. One or more such IC packages can bephysically and electrically coupled to a secondary substrate such as aprinted circuit board (PCB) or motherboard to form an “electronicassembly”. The “electronic assembly” can be part of an “electronicsystem”. An “electronic system” is broadly defined herein as any productcomprising an “electronic assembly”. Examples of electronic systemsinclude computers (e.g., desktop, laptop, hand-held, server, etc.),wireless communications devices (e.g., cellular phones, cordless phones,pagers, etc.), computer-related peripherals (e.g., printers, scanners,monitors, etc.), entertainment devices (e.g., televisions, radios,stereos, tape and compact disc players, video cassette recorders, MP3(Motion Picture Experts Group, Audio Layer 3) players, etc.), and thelike.

In the field of electronic systems there is an incessant competitivepressure among manufacturers to drive the performance of their equipmentup while driving down production costs. This is particularly trueregarding the packaging of ICs, where each new generation of packagingmust provide increased performance while generally being smaller or morecompact in size. As market forces drive equipment manufacturers toproduce electronic systems with increased performance and decreasedsize, IC packaging accordingly also needs to support these requirements.

In addition, manufacturers of high-end IC packages, such as processors,are experiencing increasing demand for IC packages mounted in thin,light-weight, and/or resilient packaging, because such packaging isuseful for many applications. For example, hand-held electronic systems,such as cellular telephones, palm-top computers, personal digitalassistants, calculators, MP3 players, watches, hearing aids, and similarequipment typically require ICs in thin, light-weight, and/or flexiblepackages.

An IC substrate may comprise a number of layers. Each layer may includea pattern of metal interconnect lines (referred to herein as “traces”)on one or both surfaces. Each layer may also include vias to coupletraces or other conductive structure on opposite surfaces of the layer.

An IC substrate typically includes one or more electronic componentsmounted on one or more surfaces of the substrate. The electroniccomponent or components are functionally connected to other elements ofan electronic system through a hierarchy of electrically conductivepaths that include the substrate traces and vias. The substrate tracesand vias typically carry signals that are transmitted between theelectronic components, such as ICs, of the system. Some ICs have arelatively large number of input/output (I/O) terminals (also called“lands” or “pads”), as well as a large number of power and groundterminals.

Surface mount technology (SMT) is a widely known technique for couplingICs to a substrate. In addition to using SMT to couple an individual ICdie to a substrate, it is also well known to use SMT to couple an ICpackage to a substrate such as a printed circuit board (PCB) ormotherboard, using solder bumps, for example.

The formation of conductor features, such as traces and vias, in asubstrate typically requires a sequence of complex, time-consuming, andexpensive operations that offer ample opportunities for error. Forexample, forming traces on a single surface of a substrate layertypically requires surface preparation, metallizing, masking, etching,cleaning, and inspecting. Forming vias typically requires drilling,using a laser or mechanical drill. Each process stage requires carefulhandling and alignment to maintain the geometric integrity of the myriadof traces, vias, and other features. To allow for alignment tolerances,feature sizes and relationships often must be kept relatively large,thus hindering significant reductions in feature density. For example,to provide sufficient tolerance for drilling vias, via pads aretypically proved, and these consume significant “real estate”.

Fabrication of a typical multi-layer substrate requires that a largenumber of process operations be performed. In a known example of amulti-layer substrate, a core layer has vias (also referred to herein as“plated through holes” or “PTHs”) and traces. Traces may be formed onone or both surfaces of the core layer. One or more build-up layers,each with traces on one or more surfaces, and typically with PTHs, areformed. The features of the build-up layers can be formed while theselayers are separate from the core layer, and the build-up layers maythen be subsequently added to the core layer. Alternatively, somefeatures of the build-up layers may be formed after such layers havebeen added to the core layer.

For the reasons stated above, and for other reasons stated below whichwill become apparent to those skilled in the art upon reading andunderstanding the present specification, there is a significant need inthe art for methods of electronics packaging, and correspondingsubstrate fabrication apparatus, that minimize the complexity, time, andcost of fabricating substrates.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates a cross-sectional representation of an electronicassembly incorporating a substrate that is formed by imprinting, inaccordance with an embodiment of the inventive subject matter;

FIG. 2 illustrates a cross-sectional representation of a substrateformed by imprinting, and corresponding upper and lower imprintingelements, in accordance with an embodiment of the inventive subjectmatter;

FIG. 3 illustrates a cross-sectional representation of a substrateformed by imprinting, and a corresponding imprinting element havingrelatively short imprinting dies, in accordance with an embodiment ofthe inventive subject matter;

FIG. 4 illustrates a cross-sectional representation of a substrateformed by imprinting, and a corresponding imprinting element havingrelatively long imprinting dies, in accordance with an embodiment of theinventive subject matter;

FIG. 5 illustrates a block diagram of a substrate-imprinting apparatus,including a cross-sectional representation of upper and lower imprintingelements, and an imprintable tape, in accordance with an embodiment ofthe inventive subject matter;

FIG. 6 illustrates a top view of a portion of the imprintable tape shownin FIG. 5 having a pattern of alignment marks thereon, in accordancewith an embodiment of the inventive subject matter;

FIG. 7 illustrates a top view of a portion of imprintable tape having apattern of alignment marks thereon, in accordance with an embodiment ofthe inventive subject matter;

FIG. 8 illustrates a top view of a portion of imprintable tape having apattern of alignment holes thereon, in accordance with an embodiment ofthe inventive subject matter; and

FIGS. 9A and 9B together form a flow diagram illustrating a method offabricating an imprinted substrate, using an imprintable tape, to mountan electronic component, in accordance with one or more embodiments ofthe inventive subject matter.

DETAILED DESCRIPTION

In the following detailed description of embodiments of the inventivesubject matter, reference is made to the accompanying drawings that forma part hereof, and in which is shown by way of illustration specificpreferred embodiments in which the subject matter may be practiced.These embodiments are described in sufficient detail to enable thoseskilled in the art to practice them, and it is to be understood thatother embodiments may be utilized and that mechanical, chemical,structural, electrical, and procedural changes may be made withoutdeparting from the spirit and scope of the present subject matter. Thefollowing detailed description is, therefore, not to be taken in alimiting sense, and the scope of embodiments of the present inventivesubject matter is defined only by the appended claims.

FIG. 1 illustrates a cross-sectional representation of an electronicassembly 5 incorporating a substrate 20 that is formed by imprinting, inaccordance with an embodiment of the inventive subject matter.

“Imprint”, as used herein, means to form features in a material byforcing a tool against and/or into the material. Imprinting includesstamping, embossing, impressing, extruding, and like processes.

Electronic assembly 5 includes at least one integrated circuit (IC) 10or other type of active or passive electronic component having aplurality of conductive mounting pads 12. The electronic component maybe in either packaged or unpackaged form, as appropriate to the type ofsubstrate 20. The IC 10 (or other type of electronic component) may beof any type, including a microprocessor, a microcontroller, a graphicsprocessor, a digital signal processor (DSP), or any other type ofprocessor or processing circuit. Other types of electronic componentsthat may be included in electronic assembly 5 are a custom circuit, anapplication-specific integrated circuit (ASIC), or the like, such as,for example, one or more circuits (such as a communications circuit) foruse in wireless devices like cellular telephones, pagers, computers,two-way radios, and similar electronic systems. Electronic assembly 5may form part of an electronic system (as defined in the Backgroundsection above).

IC 10 is physically and electrically coupled to substrate 20. In anexemplary embodiment, IC pads 12 are coupled to corresponding lands 14on the upper surface of upper build-up section 21 through a suitableattachment mechanism such as solder balls or bumps (not shown).

“Suitable”, as used herein, means having characteristics that aresufficient to produce the desired result(s). Suitability for theintended purpose can be determined by one of ordinary skill in the artusing only routine experimentation.

Electronic assembly 5 may include an additional substrate, such as aprinted circuit board (PCB) 24 (or interposer), below substrate 20.Substrate 20 may be physically and electrically coupled to PCB 24. In anexemplary embodiment, substrate pads 18 are coupled to correspondinglands 48 on the upper surface 40 of PCB 24 through a suitable attachmentmechanism such as solder (not shown). PCB 24 can optionally have lands(not shown) on its lower surface for attachment to an additionalsubstrate or other packaging structure in the packaging hierarchy.

In the example shown in FIG. 1, the substrate 20 comprises a core layer22, an upper build-up section 21 of one or more layers, and a lowerbuild-up section 23 of one or more layers. One of ordinary skill in theart will appreciate that many alternative embodiments are possible,including but not limited to a substrate comprising only a core layer; asubstrate comprising a core with two or more upper and/or lower build-uplayers; a substrate comprising a core with only upper build-up layer(s);a substrate comprising a core with only lower build-up layer(s); and soforth.

The various constituent layers of substrate 20 can be formed of anysuitable material or combination of materials, such as organic orceramic materials. In various exemplary embodiments, the substratestarting materials may comprise partially-cured organic materials,chemically or thermally softened organic materials, and green ceramicmaterials. Any other suitable type of material may be used, providedthat it can receive an imprint and can retain such for a period of timelong enough to permit the imprinted features, such as vias and trenches,to be formed into conductor features, as for example by insertingconductive material into the imprinted features.

“Conductor feature”, as used herein, means any type of conductingelement associated with a substrate, including vias (e.g. blind vias,through vias, etc.), conductors (e.g. surface traces, internal traces,conductive planes, etc.), mounting terminals (e.g. pads, lands, etc.),and the like.

“Via”, as used herein, means any type of conducting element to provide aconductive path between different depths in a substrate. For example, avia can connect conductive elements on opposite surfaces of a substrate,and a via can connect conductive elements at different internal layerswithin a substrate.

“Trench”, as used herein, means any type of conducting element toprovide a conductive path at a relatively constant depth in a substrate.“Trench” includes traces, ground planes, and terminals. For example, atrace may connect conductive elements on one surface of a substrate. Aground plane may provide a conductive path at a relatively constantdepth within a substrate. Terminals may provide conductive paths on onesurface of a substrate.

Core layer 22, in the example shown in FIG. 1, comprises conductorfeatures in the form of vias 26-28. Core layer 22 also comprisesconductor features in the form of one or more trenches 34 in its uppersurface, one or more trenches 35 in its lower surface, and one or moreinternal trenches (e.g. traces 71 and 72). Some or all of the conductorfeatures may be formed through an imprinting process, as will beexplained in greater detail below.

Core layer 22 may be formed in various ways. For example, core layer 22may be formed as a single layer of material. Alternatively, core layer22 may comprise multiple layers of material. In the example shown inFIG. 1, core layer 22 comprises multiple layers, and internal traces 71and 72 are formed in the vicinity of the boundaries between individuallayers. The boundaries between the multiple layers making up core layer22 are not shown in FIG. 1. Internal traces 71 and 72 may be formed inany suitable manner, including a manner that is similar to or identicalto that used to form trenches in upper build-up section 21 and lowerbuild-up section 23, as will be explained in greater detail below.

Upper build-up section 21, in the example shown in FIG. 1, comprisesthree build-up layers 2-4. Upper build-up section 21 further comprisesconductor features in the form of one or more vias 25 and 26, one ormore trenches (e.g. trace 31 and lands 14) in the upper surface of layer2, and one or more trenches 33 in the lower surface of layer 4. Upperbuild-up section 21 may further comprise internal trenches 32, which maybe formed in the internal upper and/or lower surfaces of layers 2-4,such as in the lower surface of layer 2, the upper or lower surfaces oflayer 3, and/or in the upper surface of layer 4.

Lower build-up section 23, in the example shown in FIG. 1, comprises twobuild-up layers 6-7. Lower build-up section 23 further comprisesconductor features in the form of one or more vias 26 and 39, one ormore trenches 36 in the upper surface of layer 6, and one or moretrenches (e.g. traces 38 and pads 18) in the lower surface of layer 7.Lower build-up section 23 may further comprise one or more internaltrenches 37, which may be formed in the internal upper and/or lowersurfaces of layers 6-7, such as in the lower surface of layer 6, and/orin the upper surface of layer 7.

FIG. 2 illustrates a cross-sectional representation of a substrate 202formed by imprinting, and corresponding upper and lower imprintingelements 201 and 203, in accordance with an embodiment of the inventivesubject matter. Substrate 202, as shown in FIG. 2, can be aself-contained substrate, or it can form part of a multi-layersubstrate.

Substrate 202 comprises one or more vias, such as vias 221 and 225.Substrate 202 further comprises one or more trenches, such as trenches222, 224, 242, and 243. Trenches 222 and 224 (e.g. traces or lands) arein the upper surface of substrate 202, while other trenches, such astrenches 242-243, are in the lower surface of substrate 202.

Via 225 is formed within trench 224. In accordance with the presentsubject matter, vias, such as via 225, need not be formed within viapads. Via pad 226, shown in dashed outline, depicts a prior artstructure (unnecessary in embodiments of the present inventive subjectmatter) that is used to assure that vias are drilled within a region ofthe substrate so that they ultimately make electrical contact with atrace to which the via pad is connected. Via pads, as used in prior artsubstrate structures, thus provide a fairly wide tolerance with respectto the location of corresponding via holes. A disadvantage of using viapads is the significant amount of real estate they consume on thesubstrate surface.

In the imprinted substrate 202 depicted in FIG. 2, the trench 224 andthe via 225 are formed simultaneously, so there is no need to provide avia pad to assist in registering via 225 with trench 224. By eliminatingthe need for via pads, the imprinted substrate 202 can accommodate ahigher density of conductor features, such as vias, traces, and mountingterminals.

Also shown in FIG. 2 are an upper imprinting element 201 and a lowerimprinting element 203. Upper and lower imprinting elements 201 and 203may be considered imprinting tools. They may also be referred to asstamping tools or micro tools.

Upper imprinting element 201 comprises a plurality of protrusions ordies, such as dies 211-214. Dies 211-214 may be of different geometries.For example, dies 211-214 may have different widths and depths. Dies 211and 214 have greater depths than dies 212 and 213. Dies 211 and 213 havegreater widths than die 212.

Die 214 provides a combination of at least two different geometries. Die214 includes a relatively wide region 215 at its base, corresponding totrench 224 in the upper surface of substrate 202. Die 214 furtherincludes a narrower region 216, corresponding to via 225 in substrate202.

Lower imprinting element 203 also comprises a plurality of protrusionsor dies, such as dies 231-233. Dies 231-233 may be of differentgeometries. For example, dies 231-233 may have different widths anddepths. Die 231 has a greater depth than die 232. Die 233, to formmounting pad 243, has a greater width than dies 231 and 232.

FIG. 3 illustrates a cross-sectional representation of a substrate 305formed by imprinting, and a corresponding imprinting element 301 havingrelatively short imprinting dies 311-315, in accordance with anembodiment of the inventive subject matter. Substrate 305, as shown inFIG. 3, can be a self-contained substrate, or it form part of amulti-layer substrate.

Substrate 305 comprises an upper layer 302 and a lower layer 202. In anexemplary embodiment wherein additional build-up layers (not shown) areadded below layer 202, layer 202 could be described as a core layer. Forexample, in an exemplary embodiment, a number of build-up layers couldlie both above and below layer 202. Layer 202 may include internaltraces (not shown) situated between multiple layers (not shown). Suchinternal traces could be formed in any suitable manner, including amanner that is similar to or identical to that used to form trenches324-325 in upper layer 302, as will be explained in greater detailbelow.

In the example shown in FIG. 3, layer 202 has been previously imprintedin an imprinting operation. After the imprinting operation, a suitableconductive material such as copper was inserted into the conductorfeatures of layer 202. Thus, vias 221 and 225, and trenches 222 and 242,contain conductive material, as represented by cross-hatching.

After having conductive material applied to it, layer 202 was registeredwith and coupled to layer 302 to form substrate 305.

Layer 302 comprises a plurality of conductor features that have beenformed therein. The conductor features may include vias such as vias321-323 and trenches such as trenches 324-325.

Also shown in FIG. 3 is an imprinting element 301. Imprinting element301 includes a plurality of dies 311-315. In the example shown in FIG.3, the depths of dies 311-313, used to form corresponding vias 321-323in layer 302, are relatively short, and they do not extend beyond thelower surface of layer 302 when imprinting element 301 is pressedagainst layer 302.

Die 313 is asymmetrical and is shaped to form a via at or very near theedge of a trench. Die 313 comprises a portion 316 to form via 326. Die313 further comprises a portion 317 to form trench 327. Portion 317 isoffset from portion 316.

FIG. 4 illustrates a cross-sectional representation of a substrate 405formed by imprinting, and a corresponding imprinting element 401 havingrelatively long imprinting dies 412-413, in accordance with anembodiment of the inventive subject matter. Substrate 405, as shown inFIG. 4, can be a self-contained substrate, or it form part of amulti-layer substrate.

Substrate 405 comprises an upper layer 402 and a lower layer 403. In anexemplary embodiment wherein additional build-up layers (not shown) areadded below layer 403, layer 403 could be described as a core layer. Forexample, in an exemplary embodiment, a number of build-up layers couldlie both above and below layer 403. Layer 402 may include internaltraces (not shown) situated between multiple layers (not shown). Suchinternal traces could be formed in any suitable manner, including amanner that is similar to or identical to that used to form trenches 424and 427 in upper layer 402.

In the example shown in FIG. 4, lower layer 403 has been previouslyimprinted in an imprinting operation. After the imprinting operation, asuitable conductive material such as copper was inserted into theconductor features of layer 403. Thus, trenches 432 and 442 containconductive material, as represented by cross-hatching.

After having conductive material applied to it, lower layer 403 wasregistered with and coupled to upper layer 402. Lower layer 403, whichhad certain conductor features (e.g. trenches 432 and 442) imprinted ina first imprinting operation (using a different imprinting element thanimprinting element 401), may have other conductor features (e.g. vias421, 422, and 423) imprinted in a second imprinting operation (usingimprinting element 401).

Also shown in FIG. 4 is an imprinting element 401. Imprinting element401 includes a plurality of dies 411-415. In this example, the depths ofdies 412-413 that are used to form corresponding vias 422-423 in layer402 are relatively long, and they extend beyond the lower surface oflayer 402 when imprinting element 401 is pressed against layer 402. Dies412 and 413 may extend as far into layer 403 as dashed line 425

In the example shown in FIG. 4, upper layer 402 has not been previouslyimprinted in an imprinting operation. Upper layer 402, in registrationwith lower layer 403, is imprinted simultaneously with lower layer 403.In such an imprinting operation, various conductor features are formedin upper layer 402. The conductor features may include via 421 (whichalso extends partly into lower layer 403), vias 422-423, and trenchessuch as trenches 424 and 427.

As mentioned above, dies 412-413 are used to form vias 422-423. Vias422-423 pass entirely through upper layer 402 and at least partly intolower layer 403, down to dashed line 425. In the embodiment shown inFIG. 4, the lower portions 428-429 of vias 422-423 within lower layer403 are formed by corresponding dies of a lower imprinting element (notshown). Alternatively, the lower portions 428-429 of vias 422-423 couldbe formed by the use of a different imprinting element 401 having longerdies 412-413.

Die 411 of imprinting element 401 is relatively short. Die 411 extendsentirely through upper layer 402, forming via 421 therein, and die 411further extends only to dashed line 441 within lower layer 403.

Dies 414 and 415 of imprinting element 401 are also relatively short,and they are used to form corresponding trenches 424 and 427 in theupper surface of upper layer 402.

Die 413 is shaped to form a via within a trench. Die 413 comprises arelatively long portion 413 to form via 423. Die 413 further comprises aportion 416 to form a corresponding trench 426.

In addition to the examples shown, many other types of substrates can beformed, including printed circuit board (PCB) substrates having one ormore layers.

FIG. 5 illustrates a block diagram of a substrate-imprinting apparatus501, including a cross-sectional representation of upper and lowerimprinting elements 502 and 503, and an imprintable film or tape 520, inaccordance with an embodiment of the inventive subject matter.

Substrate-imprinting apparatus 501, in the example illustrated in FIG.5, may comprise a tape supply element such as a tape supply roll 521,and a tape take-up element such as tape take-up roll 522. One or both oftape supply roll 521 and tape take-up roll 522 are driven by a suitabledrive element, such as drive 558. For example, drive 558 may be coupledto tape take-up roll 522 through a suitable drive shaft 559, gearing, orother drive mechanism.

Imprintable tape 520, which is depicted schematically in FIG. 5, is notdrawn to scale and is typically much thicker than shown. Its relativethickness, compared with imprinting elements 502 and 503 may becomparable to that of substrate 202 relative to imprinting elements 201and 203 (FIG. 2). Imprintable tape 520 may comprise one or more layers.The width of imprintable tape 520 may be approximately the same as thatof the substrate being fabricated. In other embodiments, the width ofimprintable tape 520 may be wider than that of the substrate beingfabricated.

Imprintable film or tape 520 may be formed of material selected from thegroup comprising bismaleimide resin, such as bismaleimide triazene(known in the art as “BMT”), epoxy, liquid crystal polymer,polycarbonate, polyester, polyether, and polyimide. Optionally, theimprintable tape material may be formed of a polymer, such as polyimideor epoxy, to which particles have been added. For example, the particlesmay comprise silica, alumina, or fiberglass.

Imprinting elements 502 and 503 may be similar to those discussed abovein FIGS. 2-4. Imprinting elements 502 and 503 each comprise a pluralityof protrusions or dies. The dies can have different geometries,corresponding to the desired geometries of the set of conductor featuresto be imprinted into imprintable tape 520. Dies to form vias may havedifferent depths, widths, etc. Likewise, dies to form trenches may havedifferent depths, widths, lengths, etc.

For example, upper imprinting element 502 may comprise a plurality ofrelatively long dies, such as die 511 and die portion 515 of die 513.Dies 511 and 515 may form vias, or portions of vias, in imprintable tape520.

Upper imprinting element 502 may also comprise a plurality of relativelyshort dies, such as die 512 and portion 514 of die 513. Dies 512 and 514may form trenches (e.g. for traces and/or terminals) in imprintable tape520.

Similarly, lower imprinting element 503 may comprise a plurality ofdies, such as dies 531 and 532. Die 531 is relatively long, and it maybe circular in cross-section, in order to form a corresponding via orportion thereof in imprintable tape 520. Die 532 is relatively short, atleast in a cross-sectional depiction; however, it may have a relativelylengthy dimension, as viewed into the drawing, in order to form arelatively long trace, for example.

Imprinting elements may be formed of any suitable material. In anembodiment, the imprinting elements are formed of solid nickel ornickel-plated metal. Other materials with the requisite properties, suchas hardness, may also be used. Imprinting elements could be fabricated,for example, by the manufacturers of microtools used to make compactdiscs (“CDs”), once the present subject matter has been reviewed.

Substrate-imprinting apparatus 501 may include a controller 557.Controller 557 may be coupled to drive 558 through bus 556. Controller557 may be coupled to upper imprinting element 502 and to lowerimprinting element 503 through busses 507 and 508, respectively.Controller 557 may be implemented in any suitable manner, such asthrough a programmable machine or a fixed-program machine.

Controller 557 may also be coupled to one or more detectors, such asdetectors 551 and 552, via bus 555. Detector 552 may detect an alignmentfeature (e.g. alignment features 641-644, FIG. 6) on imprintable tape520. Pathway 554 schematically depicts an alignment relationship betweenan alignment feature on imprintable tape 520 and detector 552. Thealignment relationship may be implemented through any suitable alignmentmechanism. For example, a relatively narrow light beam originating indetector 552 could be reflected off a reflective area on imprintabletape 520 and detected by an optical receiver within detector 552.Pathway 554 could also represent a magnetic, electrical, mechanical, orother alignment relationship between detector 552 and an alignmentfeature on imprintable tape 520. For example, pathway 554 couldrepresent a mechanical arm or cog that engages in a hole in imprintabletape 520.

An additional detector, such as detector 551, could also be used todetect an alignment feature on imprintable tape 520 through acorresponding pathway 553. Detectors 551 and 552, and associatedpathways 553 and 554, may be of different types and may be located inany suitable place. For example, detectors could be located on the samesurface of imprintable tape 520 but on opposite edges; they could besituated on opposite surfaces of imprintable tape 520; etc.

Using input from one or more detectors 551 and 552, controller 557 mayadjust the relative positions of the imprintable tape 520, the upperimprinting element 502, and the lower imprinting element 503. Controller557 may do this by controlling drive 558 and/or by controlling themovement of the upper imprinting element 502 and the lower imprintingelement 503 in the X and Y dimensions through suitable controlmechanisms (not shown).

When controller 557 determines that everything is properly aligned,controller 557 controls the upper imprinting element 502 and the lowerimprinting element 503 in the Z dimension. The upper imprinting element502 is moved downward into the upper surface of imprintable tape 520,and the lower imprinting element 503 is moved upward into the lowersurface of imprintable tape 520.

FIG. 6 illustrates a top view of a portion of the imprintable tape 520shown in FIG. 5 having a pattern of alignment marks 641-644 thereon, inaccordance with an embodiment of the inventive subject matter.

In the embodiment illustrated in FIG. 6, four alignment marks 641-644are shown. Alignment marks 641-644 are used to align the imprintabletape 520 in various apparatus used to fabricate substrates. Suchapparatus may include, but is not necessarily limited to, thesubstrate-imprinting apparatus 501 of FIG. 5. Other types of fabricationapparatus using alignment marks 641-644 may include apparatus to joinsubstrate layers, to add or remove material and/or features, to inspect,etc.

More or fewer alignment marks could be used. The alignment marks mayhave a different shape than that shown. Alignment marks of differentshapes, sizes, types, etc. could be used concurrently.

In the embodiment shown in FIG. 6, the alignment marks 641-644 aredepicted as positioned outside of a conductor region 651 depicted by adashed outline.

“Conductor region”, as used herein, means an imaginary projection of aregion on the substrate, inside of which region all conductor features(as defined earlier) are contained. A “conductor region” is typicallysubstantially square or rectangular, although it need not be limited tosuch shapes.

In an embodiment, alignment marks 641-644 are positioned outside ofconductor region 651 so as not to encroach upon the surface real estateavailable for conductor features and other substantive elements of thesubstrate. However, in another embodiment, the alignment marks may bepositioned within the conductor region.

In the embodiment illustrated in FIGS. 5 and 6, upper and lowerimprinting elements 502 and 503 are sized to imprint in a tape regionencompassing only a single substrate segment. By using imprintingelements of reduced size, relative to the surface area of the substratebeing imprinted, better control can be achieved in the Z-dimension, thatis, the dimension into the substrate material. Both the substratematerial and the imprinting element can be flatter, and the imprintdepth can be more uniform over the entire surface of the imprintedmaterial, compared to an imprinting system in which a relatively largesubstrate surface (e.g. comprising a large number of substrate segmentsside-by-side) is imprinted using an imprinting element having arelatively large surface.

Further, by using imprinting elements and substrate segments that haverelatively small surfaces, any required heating and cooling cycles canbe carried out more quickly.

Further, because the alignment features are close to the substratesegments, better alignment accuracy can be achieved, resulting inimproved yield and reliability.

FIG. 7 illustrates a top view of a portion of imprintable tape 700having a pattern of alignment marks thereon, in accordance with anembodiment of the inventive subject matter.

Imprintable tape 700 comprises a plurality of tape regions or segments701-703. Each segment 701-703 represents an individual substrate, or aportion of an individual substrate (e.g. a single-layer portion or amulti-layer portion). With respect to one segment 701, it may compriseone or more alignment marks 741 and 742, and it comprises a conductorregion 751 shown in dashed outline. The size and position of theconductor region 751, relative to segment 701, may be varied.

Alignment marks 741 and 742 are depicted in this example as outsideconductor region 751; however, in other embodiments the alignment marksmay be positioned inside the conductor region 751, or alignment marksmay be positioned both inside and outside conductor region 751.

FIG. 8 illustrates a top view of a portion of imprintable tape 800having a pattern of alignment holes thereon, in accordance with anembodiment of the inventive subject matter.

Imprintable tape 800 comprises a plurality of tape regions or segments801-803. Each segment 801-803 represents an individual substrate, or aportion of an individual substrate (e.g. a single-layer portion or amulti-layer portion). With respect to one segment 801, it may compriseone or more alignment sprockets or holes 841 and 842, and it comprises aconductor region shown between dashed lines 851 and 852. The size andposition of the conductor region, relative to segment 801, may bevaried.

Alignment holes 841 and 842 are depicted in this example as outside theconductor region bounded by dashed lines 851 and 852; however, in otherembodiments the alignment holes may be positioned inside the conductorregion, or alignment holes may be positioned both inside and outside theconductor region.

Alignment holes, such as alignment holes 841 and 842, can be used inconjunction with a suitable transport mechanism (not shown) tofacilitate production movement within a high volume manufacturingenvironment.

FIGS. 9A and 9B together form a flow diagram illustrating a method offabricating an imprinted substrate, using an imprintable tape, to mountan electronic component, in accordance with one or more embodiments ofthe inventive subject matter.

In 901, a tape of imprintable material is positioned adjacent animprinting element. The imprinting element is sized to imprint a taperegion or segment (such as segment 701, FIG. 7) that encompasses only asingle substrate. The substrate is to mount at least one electroniccomponent.

The tape region may include at least one alignment feature, such as oneor more holes (e.g. sprocket holes) or optical alignment marks. Anyother suitable type of alignment feature could also be used. Thealignment feature may be outside the substrate. For example, thealignment feature may be outside a conductor region (e.g. conductorregion 751, FIG. 7).

The tape region of the substrate may comprise one or more layers. Thesubstrate may be formed of material selected from the group comprisingbismaleimide resin such as bismaleimide triazene (known in the art as“BT”), driclad, epoxy, liquid crystal polymer, polycarbonate, polyester,polyether, and polyimide. Optionally, the substrate material may beformed of a polymer, such as polyimide or epoxy, to which particles havebeen added. For example, the particles may comprise silica, alumina, orfiberglass.

The substrate material may be heated prior to imprinting. As an example,polyether material may be heated to a temperature in the range ofapproximately 20 to 250 degrees Celsius prior to imprinting.

The substrate may be formed of a partially-cured material selected fromthe group comprising bismaleimide resin such as bismaleimide triazene(“BT”), epoxy, polycarbonate, polyester, and polyimide. Apartially-cured polymer, referred to in the art as a “B-stage polymer”,may be used. The material should be sufficiently soft to be malleableand formable, but it should be sufficiently firm to retain features thatare subsequently imprinted into it.

As an example, a partially-cured material may include polyimide heatedto a temperature in the range of approximately room temperature (e.g.,20 degrees Celsius) to approximately 250 degrees C. As another example,the partially-cured material may include an epoxy-based polymer heatedto a temperature in the range of approximately room temperature toapproximately 170 degrees C. Heating may be provided by any suitableapparatus, such as infra-red or microwave radiation, heating coils, etc.

In 902, while maintaining the temperature of the substrate material atthe previously described temperature, the imprinting element is used tosimultaneously form a plurality of conductor features in the tape regionof the substrate. The conductor features may be imprinted in one or bothsurfaces of the substrate. The set of conductor features may include oneor more vias and/or trenches. The conductor features may optionally havedifferent geometries. For example, the conductor features may havedifferent depths, widths, lengths, thicknesses, and the like. Vias maybe formed within trenches, e.g. centered within a trench or along theside of a trench. Vias need not be formed within via pads. All conductorfeatures can be formed simultaneously within one or multiple layers.

In 903, if necessary, the substrate material is completely cured througha suitable process. For example, in the above-mentioned example ofpolyimide, it may be cured by heating it within the range ofapproximately 300 to 400 degrees C. In the above-mentioned example of anepoxy-based polymer, it may be cured by heating it within the range ofapproximately 100 to 200 degrees C. It will be understood by those ofordinary skill in the art that the cure times for such substratematerials may be inversely proportional to the cure temperatures. As oneexample, a substrate formed from a particular epoxy-based polymer may becured at 170 C for 30 minutes or at 120 C for 90 minutes.

Although not shown in FIGS. 9A-9B, at a suitable point in the process,e.g. subsequent to curing the substrate material (if a curing operationis necessary), an electrically conductive material is inserted into theconductor features. The conductive material can be of any suitable type,such as copper, aluminum, silver, etc. The metallization operation maybe performed using a suitable technique such as sputtering, plating,etc. A suitable operation to planarize the substrate may be usedsubsequent to metallization.

A suitable cleaning operation may be performed on the substratematerial, if and when required, for example prior to a curing operation,and/or prior to a metallization operation.

Eventually the imprintable tape is separated or “singulated” intoindividual segments. After singulation, the individual tape substratesegments may be transported throughout the fabrication environmentthrough any suitable apparatus, such as transport carriers or trays, forsubsequent fabrication operations, such as combining them with one ormore other substrate layers, inspecting them, and possibly othermanufacturing operations.

Other types of suitable imprintable material may be used.

The operations described above with respect to the methods illustratedin FIGS. 9A-9B can be performed in a different order from thosedescribed herein.

Embodiments of the present inventive subject matter provide for thefabrication of electronic substrates that can be fabricated withrelatively less complexity, time, and cost, and with relatively greaterdensity compared with known electronic substrates.

An electronic system that incorporates one or more electronic assembliesthat utilize the present subject matter can be produced inconfigurations having reduced cost and enhanced reliability relative toknown structures and fabrication methods, and such systems are thereforemore commercially attractive.

As shown herein, the present subject matter can be implemented in anumber of different embodiments, including an electronic packagesubstrate, an electronic package, various methods of fabricating asubstrate, and a machine to fabricate a substrate. Other embodimentswill be readily apparent to those of ordinary skill in the art. Theelements, materials, geometries, dimensions, and sequence of operationscan all be varied to suit particular packaging requirements.

FIGS. 1 through 8 are merely representational and are not drawn toscale. Certain proportions thereof may be exaggerated, while others maybe minimized. FIGS. 1-9 are intended to illustrate variousimplementations of the subject matter that can be understood andappropriately carried out by those of ordinary skill in the art.

Although specific embodiments have been illustrated and describedherein, it will be appreciated by those of ordinary skill in the artthat any arrangement that is calculated to achieve the same purpose maybe substituted for the specific embodiment shown. This application isintended to cover any adaptations or variations of the present subjectmatter. Therefore, it is manifestly intended that embodiments of thisinventive subject matter be limited only by the claims and theequivalents thereof.

It is emphasized that the Abstract is provided to comply with 37 C.F.R.§ 1.72(b) requiring an Abstract that will allow the reader to quicklyascertain the nature and gist of the technical disclosure. It issubmitted with the understanding that it will not be used to interpretor limit the scope or meaning of the claims.

In the foregoing Detailed Description of Embodiments of the Inventivesubject matter, various features are grouped together in a singleembodiment for the purpose of streamlining the disclosure. This methodof disclosure is not to be interpreted as reflecting an intention thatthe claimed embodiments of the inventive subject matter require morefeatures than are expressly recited in each claim. Rather, as thefollowing claims reflect, inventive subject matter lies in less than allfeatures of a single disclosed embodiment. Thus the following claims arehereby incorporated into the Detailed Description of Embodiments of theInventive subject matter, with each claim standing on its own as aseparate preferred embodiment.

1. A method comprising: positioning a tape of imprintable materialadjacent an imprinting element, the imprintable material having an uppersurface to mount an electronic component, and the imprintable materialhaving a lower surface; and using the imprinting element, forming aplurality of conductor features simultaneously in a tape regionencompassing only a single substrate to mount at least one electroniccomponent; wherein the plurality of conductor features include aplurality of vias; wherein at least a first one of the vias comprises anupper portion formed by imprinting it from the upper surface; andwherein the at least first one of the vias further comprises a lowerportion formed by imprinting it from the lower surface.
 2. The methodrecited in claim 1 wherein, in positioning, the tape region comprises atleast one alignment feature.
 3. The method recited in claim 2 wherein,in positioning, the at least one alignment feature comprises one or moreholes.
 4. The method recited in claim 3 wherein, in positioning, the oneor more holes are not within the substrate.
 5. The method recited inclaim 2 wherein, in positioning, the at least one alignment featurecomprises at least one optical alignment mark.
 6. The method recited inclaim 5 wherein, in positioning, the at least one optical alignment markis not within the substrate.
 7. The method recited in claim 1 wherein,in forming, the conductor features comprise at least one trench and atleast one via formed within the at least one trench.
 8. The methodrecited in claim 1 wherein, in forming, the conductor features comprisea plurality of trenches and vias having different geometries.
 9. Themethod recited in claim 8, wherein selected trenches have differentdepths.
 10. The method recited in claim 8, wherein selected trencheshave different widths.
 11. The method recited in claim 8, whereinselected vias have different depths.
 12. The method recited in claim 8,wherein selected vias have different widths.
 13. The method recited inclaim 1 wherein, in forming, the conductor features comprise at leasttwo vias, each via being of a different width.
 14. The method recited inclaim 1 wherein, in forming, the conductor features comprise at leasttwo vias, each via being of a different depth.
 15. The method recited inclaim 1 wherein, in forming, the conductor features comprise at leastone via not formed within a via pad.
 16. The method recited in claim 1wherein, in positioning, the tape is formed of material selected fromthe group comprising bismaleimide, driclad, epoxy, liquid crystalpolymer, polycarbonate, polyester, polyether, and polyimide.
 17. Themethod recited in claim 1 wherein, in positioning, the tape is formed ofpartially-cured material selected from the group comprisingbismaleimide, epoxy, polycarbonate, polyester, and polyimide.
 18. Themethod recited in claim 17 wherein, in forming, the partially-curedmaterial comprises a filled polymer.
 19. The method recited in claim 18wherein, in forming, the filled polymer comprises material selected fromthe group consisting of epoxy and polyimide, wherein the selectedmaterial comprises a particle filler selected from the group consistingof alumina, fiberglass, and silica.
 20. The method recited in claim 17wherein, in forming, the partially-cured material comprises polyimideheated to a temperature in the range of approximately 20 to 250 degreesCelsius.
 21. The method recited in claim 20 and further comprising:completely curing the material; wherein, in completely curing, thepartially-cured material is heated to a temperature in the range ofapproximately 300 to 400 degrees Celsius.
 22. The method recited inclaim 17 wherein, in forming, the partially-cured material comprises anepoxy-based polymer heated to a temperature in the range ofapproximately 20 to 170 degrees Celsius.
 23. The method recited in claim22 and further comprising: completely curing the material; wherein, incompletely curing, the partially-cured material is heated to atemperature in the range of approximately 100 to 200 degrees Celsius.24. A machine to fabricate a substrate to mount an electronic componentcomprising: an imprinting element; and a tape transport to position atape of imprintable material adjacent the imprinting element; whereinthe imprinting element includes an imprinting tool to formsimultaneously a plurality of conductor features in an upper surface anda lower surface of the tape in a conductor region; wherein the pluralityof conductor features include a plurality of vias; wherein at least afirst one of the vias comprises an upper portion formed by imprinting itfrom the upper surface, and wherein the at least first one of the viasfurther comprises a lower portion formed by imprinting it from the lowersurface.
 25. The machine recited in claim 24, wherein the imprintingelement includes a pair of imprinting tools on opposite sides of thetape, each tool to form a plurality of conductor features on arespective side of the tape.
 26. The machine recited in claim 24,wherein the imprinting tool is to form simultaneously a set of conductorfeatures in a surface of the tape, and wherein the set is limited to anindividual substrate.
 27. The machine recited in claim 26, wherein thetape includes a plurality of alignment features for each individualsubstrate, and wherein the tape transport includes a plurality ofdetectors to detect the alignment features.
 28. The machine recited inclaim 24, wherein the imprinting tool comprises dies to form a pluralityof trenches and a plurality of vias.
 29. The machine recited in claim28, wherein selected dies to form the trenches have different depths.30. The machine recited in claim 28, wherein selected dies to form thetrenches have different widths.
 31. The machine recited in claim 29,wherein selected dies to form the vias have different depths.
 32. Themachine recited in claim 29, wherein selected dies to form the vias havedifferent widths.
 33. The machine recited in claim 26, wherein theconductor features comprise at least one trench and at least one viaformed within the at least one trench.
 34. The machine recited in claim24, wherein the tape includes at least one alignment feature, andwherein the tape transport includes at least one detector to detect thealignment feature.
 35. The machine recited in claim 34, wherein the atleast one alignment feature comprises one or more holes.
 36. The machinerecited in claim 34, wherein the one or more holes are not within thesubstrate.
 37. The machine recited in claim 34, wherein the at least onealignment feature comprises at least one optical alignment mark.
 38. Themachine recited in claim 37, wherein the at least one optical alignmentmark is not within the substrate.
 39. The machine recited in claim 24,wherein the tape has a width approximating that of the substrate.